Coating Materials | Coating Materials / Special Coating Materials |
물질 | 분자식 | 밀도 | 반사율 | 투과율범위 | 증착온도 | 보트 | 적용 |
---|---|---|---|---|---|---|---|
Magnesium Fluoride | MgF2 | 3.13 g/cm3 | 1.38/550 nm | 0.13-7 ㎛ | 1300-1600 ℃ | W.Mo.Ta | A R Coatings. Multi-layers. |
Calcium Fluoride | CaF2 | 3.18 g/cm3 | 1.23-1.42/550 nm | 0.15-12 ㎛ | 1280-1400 ℃ | W.Mo.Ta | A R Coatings. |
Barium Fluoride | BaF2 | 4.83 g/cm3 | 1.4/10600 nm | 0.22-11 ㎛ | 1280 ℃ | Mo.Ta.Pt | V.V-FAR Multi-layers. A R Coatings. |
Cerium Fluoride | CeF3 | 6.16 g/cm3 | 1.63/500 nm | 0.3-5 ㎛ | 1429 ℃ | Mo.Ta.E | A R Coatings. Multi-layers. |
Lanthanum Fluoride | LaF3 | 6.0 g/cm3 | 1.58/500 nm | 0.22-14 ㎛ | 1450 ℃ | Mo.E | A R Coatings. |
Ytterbium Fluoride | YbF3 | 8.168 g/cm3 | 1.52/632.8 nm | 0.2-14 ㎛ | 1387 ℃ | Mo.E | I.R Multi-layers. A R Coatings. |
Yttrium Fluoride | YF3 | 4.01 g/cm3 | 1.49/632.8 nm | 0.2-15 ㎛ | 1100 ℃ | Mo | I.R Multi-layers. |
Neodynium Fluoride | NdF3 | 6.5 g/cm3 | 1.6/500 nm | 0.25-14 ㎛ | 1410 ℃ | Mo.Ta.E | |
Sodium Aluminum Fluoride |
Na3AlF6 | 2.95 g/cm3 | 1.33/500 nm | 0.22-9 ㎛ | 1000 ℃ | Mo.Ta.E | A R Coatings. |
Aluminum Fluoride | AlF3 | 2.88 g/cm3 | 1.35/500 nm | 0.2-8 ㎛ | 800-1000 ℃ | Mo.Ta.E | U V Coatings. |
Lead Flde | PbF2 | 8.24 g/cm3 | 1.76/470 nm | 0.22-9 ㎛ | 700-1000 ℃ | Pt | U V Coatings. |
Aluminum Oxide | Al2O3 | 3.94 g/cm3 | 1.62/550 nm | 0.2-5 ㎛ | 2000-2200 ℃ | E | A R Coatings. Multi-layers. |
Silicon Dioxide | SiO2 | 2.32 g/cm3 | 1.45/500 nm | 0.2-2 ㎛ | 1600-2200 ℃ | E | Multi-layers. |
Silicon Monoxide | SiO | 2.13 g/cm3 | 1.55/550 nm | 0.6-8 ㎛ | 1200-1600 ℃ | W.Mo.Ta | A R Coatings. Protective film |
Titanium Oxide | TiO2 | 4.26 g/cm3 | 2.35/500 nm | 0.4-12 ㎛ | 1700-2000 ℃ | E | A R Coatings. Multi-layers. |
Titanium mnoxide | TiO | 4.8 g/cm3 | 2.35/500 nm | 0.4-12 ㎛ | 2200 ℃ | E | A R Coatings. Multi-layers. |
Titanium(Ⅲ) Oxide | Ti2O3 | 4.6 g/cm3 | 2.35/500 nm | 0.4-12 ㎛ | 1800-2000 ℃ | Mo.Ta.Ta | A R Coatings. Multi-layers. |
Titanium(Ⅴ) Oxide Crystal/Sintered |
Ti3O5 | 4.26 g/cm3 | 2.35/500 nm | 0.4-12 ㎛ | 1750-2000 ℃ | E | A R Coatings. Multi-layers. |
Titanium(Ⅶ) Oxide Sintered |
Ti4O7 | 4.26 g/cm3 | 2.35/500 nm | 0.4-12 ㎛ | 1750-2000 ℃ | E | A R Coatings. Multi-layers. |
Zirconium Oxide | ZrO2 | 5.7 g/cm3 | 2.05/500 nm | 0.25-7 ㎛ | 2500 ℃ | E | A R Coatings. Multi-layers. |
Tantalum Oxide | Ta2O5 | 8.2 g/cm3 | 2.1/500 nm | 0.4-7 ㎛ | 1950 ℃ | E | A R Coatings. Multi-layers. |
Magnesium Oxide | MgO | 3.65 g/cm3 | 1.7/500 nm | 0.2-8 ㎛ | 2000 ℃ | E | Multi-layers. |
Cerium Dioxide | CeO2 | 7.3 g/cm3 | 2.35/500 nm | 0.4-16 ㎛ | 1950 ℃ | E | A R Coatings. |
Yttrium Oxide | Y2O3 | 5.0 g/cm3 | 1.87/500 nm | 0.4-8 ㎛ | 2500 ℃ | E | A R Coatings. Multi-layers. |